3-DOF Vibration Reduction System Design of Optical Equipment

The effect of the vibration on the optical equipment is analyzed.Aiming at the design of the vibration reduction for the optical devices,the concept of 3-DOF vibration reduction is proposed.The 3-DOF vibration reduction system has the ability of the vibration isolation buffer and the function of the angle vibration reduction suppression.The anti-vibration and anti-impact designs of 3-DOF vibration reduction system are calculated.The characteristic of the vibration reduction is verified by the bench test,which can meet the requirements of optical equipments.