Overview of Subsurface Damage Detection Technologies for Ultra-smooth Quartz Components

The quartz hemispherical shell resonator is the core component of the new generation gyroscopes-spherical resonator gyroscope. It is a hemispherical thin-walled shell structure with a central support rod. Subsurface damage (SSD) under the ultra-smooth quartz surface, which is microcracks and fractures caused by grinding, seriously affects the performance and life of the hemispherical resonator gyroscope. Most of the existing technologies focus on the SSD measurement of regular shaped quartz components, and there are few studies on the SSD of complex structures such as hemispherical shell resonators. This article reviews existing destructive evaluation methods and non-destructive evaluation methods for SSD detection, discusses the advantages and disadvantages of existing technologies when applied to SSD detection of hemispherical shell resonators. Also mature technologies and latest development are summarized, providing reference for future technical development.