Simulation of Wide Band BAW Filter for N78 Application

Abstract Based on the requirements of large bandwidth filters for 5G communications, finite element models for material analysis and filter design are established. Characteristics of lithium niobate under different cut angle are simulated, and 36° Y cut lithium niobate is used in resonator with SiO 2 /Mo acoustic reflector. The influence of top electrode is evaluated and the area of the electrode is designed. A method of co-simulation using finite element model and modified Butterworth van Dyke model is introduced. A wide band filter with relative bandwidth of 10.1% is designed while the insertion loss is less than 2 dB, which can satisfy the requirement of N78 band.