Research on ion beam figuring system with five-axis hybrid mechanism for complex optical surface

Ion beam figuring technology is ultra-high precision optical processing method. This paper introduces the independent FSGJ800-IBF five axis ion beam figuring equipment. According to the requirement of ion beam motion system dynamic performance of complex optical surface ion beam figuring, the design and control scheme of 3-RPS+XY mobile platform based on hybrid mechanism form five axis motion system was finished. Firstly, the radio frequency (RF) ion beam source was use in this machine. The Ion Beam Figuring System with Five-Axis Hybrid Mechanism was introduced especially the 3-RPS parallel mechanism. The process of polishing complex optical curved surface by ion beam is analyzed. The most close to the spherical surface processing strategy based on the experiments of high gradient lens was done. The aperture of the lens is 44mm and the R/# is 0.705, after a round of ion beam polishing, surface error of optical components RMS from the initial 0.019 lambda (lambda =632.8nm) converges to 0.006 lambda. The experiments verified the availability of the Five-Axis Hybrid Mechanism for high precision complex optical surface error correction.