沉积(地质)
激光器
化学气相沉积
脉冲激光沉积
液相
相(物质)
材料科学
化学工程
纳米技术
光电子学
工艺工程
化学
光学
薄膜
工程类
有机化学
物理
地质学
热力学
古生物学
沉积物
作者
Л. Нанаи,Krisztián Kordás,K. Bali
摘要
12 A review of results of a last few years investigation in the field of laser light induced liquid phase metal deposition on different substrates is presented. The role of liquid phase chemical deposition techniques represents a certain interest for contemporary micro technology because of its technical and economical advantages compared to other technics e.g. chemical vapor phase deposition. The methods do not require harmful precursors, complicated vacuum tools, and it is cost effective.
科研通智能强力驱动
Strongly Powered by AbleSci AI