期刊:Springer proceedings in physics日期:2020-01-01卷期号:: 65-69
标识
DOI:10.1007/978-981-15-6467-3_8
摘要
Authors proposed a new method for measuring contour shape at submicron level using spatial filtering and confirmed its effectiveness (Yazawa et al. in J SME-Jpn 4:17–22, 2014 []; Miyamoto et al. in Study of chipping inspection of cutting knife using spatial filtering, 2016 []). In this paper, the inspection system is propose, and the prototype is developed.