A Protocol for FIB-based TEM Specimen Preparation for Nanoscale Microstructural Characterization of Ceramics

Journal Article A Protocol for FIB-based TEM Specimen Preparation for Nanoscale Microstructural Characterization of Ceramics Get access S Rommel, S Rommel Department of Materials Science and Engineering, Institute of Materials Science, University of Connecticut, Storrs, CT, USA Corresponding author: sarshad.rommel@uconn.edu Search for other works by this author on: Oxford Academic Google Scholar J M Maita, J M Maita Department of Materials Science and Engineering, Institute of Materials Science, University of Connecticut, Storrs, CT, USA Search for other works by this author on: Oxford Academic Google Scholar J R Davis, J R Davis Department of Mechanical and Industrial Engineering, University of Massachusetts Amherst, Amherst, MA, USA Search for other works by this author on: Oxford Academic Google Scholar J A Wollmershauser, J A Wollmershauser Material Science & Technology Division, U.S. Naval Research Laboratory, Washington, D.C., USA Search for other works by this author on: Oxford Academic Google Scholar B Feygelson, B Feygelson Electronics Science and Technology Division, U.S. Naval Research Laboratory, Washington, D.C., USA Search for other works by this author on: Oxford Academic Google Scholar S W Lee, S W Lee Department of Materials Science and Engineering, Institute of Materials Science, University of Connecticut, Storrs, CT, USA Search for other works by this author on: Oxford Academic Google Scholar M Aindow M Aindow Department of Materials Science and Engineering, Institute of Materials Science, University of Connecticut, Storrs, CT, USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 29, Issue Supplement_1, 1 August 2023, Pages 506–508, https://doi.org/10.1093/micmic/ozad067.241 Published: 22 July 2023