抛光
材料科学
光学
激光器
飞秒
蚀刻(微加工)
氢氧化钾
制作
贝塞尔光束
曲率半径
薄脆饼
表面粗糙度
曲率
光电子学
梁(结构)
复合材料
有机化学
几何学
数学
图层(电子)
替代医学
医学
化学
流量平均曲率
平均曲率
病理
物理
作者
Jean-Loup Skora,Olivier Gaiffe,Sylwester Bargiel,Jean-Marc Cote,L Tavernier,M. de Labachelerie,Nicolas Passilly
出处
期刊:Optics Express
[The Optical Society]
日期:2022-01-20
卷期号:30 (3): 3749-3749
被引量:8
摘要
We report on the fabrication of micro-axicons made of glass by laser-assisted wet etching (LAE) and laser polishing. The employed technique, relying on an efficient direct-writing process by femtosecond laser, allows revealing high fidelity profiles while etched in a heated potassium hydroxide (KOH) solution. The remaining surface roughness is then smoothened by carbon dioxide (CO2) laser polishing. Such polishing is limited to the skin of the component so that the tip is only slightly rounded, with a radius of curvature of nearly 200 {\mu}m. It is then shown with 500 {\mu}m-diameter axicons that the quasi-Bessel beam is generated closely after the tip, and features a 5.3 {\mu}m diameter maintained over a propagation distance of almost 3.5 mm.
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