扫描透射电子显微镜
暗场显微术
扫描电子显微镜
材料科学
光学
扫描共焦电子显微镜
透射电子显微镜
探测器
常规透射电子显微镜
能量过滤透射电子显微镜
次级电子
电子
显微镜
表征(材料科学)
高分辨率透射电子显微镜
场发射枪
衍射
分析化学(期刊)
纳米技术
物理
化学
量子力学
色谱法
作者
B.S. Patel,Masashi Watanabe
标识
DOI:10.1017/s1431927613014049
摘要
Scanning transmission electron microscopy in scanning electron microscopy (STEM-in-SEM) is a convenient technique for soft materials characterization. Various specimen-holder geometries and detector arrangements have been used for bright-field (BF) STEM-in-SEM imaging. In this study, to further the characterization potential of STEM-IN-SEM, a new specimen holder has been developed to facilitate direct detection of BF signals and indirect detection of dark-field (DF) signals without the need for substantial instrument modification. DF imaging is conducted with the use of a gold (Au)-coated copper (Cu) plate attached to the specimen holder which directs highly scattered transmitted electrons to an off-axis yttrium-aluminum-garnet (YAG) detector. A hole in the copper plate allows for BF imaging with a transmission electron (TE) detector. The inclusion of an Au-coated Cu plate enhanced DF signal intensity. Experiments validating the acquisition of true DF signals revealed that atomic number (Z) contrast may be achieved for materials with large lattice spacing. However, materials with small lattice spacing still exhibit diffraction contrast effects in this approach. The calculated theoretical fine probe size is 1.8 nm. At 30 kV, in this indirect approach, DF spatial resolution is limited to 3.2 nm as confirmed experimentally.
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