材料科学
薄膜
氧气
溅射沉积
腔磁控管
溅射
分压
化学工程
分析化学(期刊)
化学
纳米技术
有机化学
工程类
色谱法
作者
Sang Jin Han,Sungmin Kim,Joongyu Ahn,Jae Kyeong Jeong,Hoichang Yang,Hyeong Joon Kim
出处
期刊:RSC Advances
[Royal Society of Chemistry]
日期:2016-01-01
卷期号:6 (75): 71757-71766
被引量:23
摘要
The composition-dependent structural and electrical properties of p-type SnOx films prepared by reactive DC sputtering at various oxygen partial pressures (PO) and post-heat treatment temperatures (TA) were investigated.
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