Tribological and electrical characteristics of dual magnetron sputtered TiN thin films for organic thin-film transistors

For biocompatible electrode applications, electrically conductive films such as titanium nitride (TiN) are needed, which do not require additional protective and adhesive layers. TiN thin films, known for their excellent flexibility and electrical conductivity, are actively researched and applied in tribology and electronics industries for biocompatible electrodes. TiN thin films were prepared using dual magnetron sputtering with varying DC sputtering power. Several tribological properties were evaluated and improved for application in biocompatible device electrodes. The sputtered TiN thin films exhibited excellent hardness, elastic modulus, adhesive strength, smooth surface, and hydrophilicity. Increasing the DC power enhanced the hardness, elastic modulus, and adhesive strength, with a slight increase in surface roughness. When applying TiN thin films as biocompatible electrodes to an organic thin-film transistor (OTFT) as a biosensor, successful electrical properties were achieved. In addition, TiN thin films contribute to improving the lifespan of OTFTs by enhancing their physical and chemical stability.