材料科学
光电子学
跨导
栅极电介质
碳化硅
金属浇口
栅氧化层
CMOS芯片
高-κ电介质
逆变器
电气工程
电介质
电压
晶体管
复合材料
工程类
作者
Neeraj Neeraj,Shobha Sharma,Anubha Goel,Sonam Rewari,S. S. Deswal,R. S. Gupta
标识
DOI:10.1149/2162-8777/ad6502
摘要
This article examines the impact of various interface trap charges on silicon carbide-based gate—stack, dual metal, surrounding gate, FET (4H-SiC-GSDM-SGFET). It has been contrasted for performance with silicon carbide (4H-SiC)-based dual metal, surrounding gate, FET (4H-SiC-DM- SGFET). For both devices, output characteristics including transconductance (g m ), output conductance (g d ), drain current (I ds ), gate capacitance (C gg ), cutoff frequency (f T ) and threshold voltage (Vth) have been examined. Surface potential and electron concentration were also inspected using a contour plot for both the device structures. A gate-stack with a high k- dielectric, Lanthanum oxide (La 2 O 3 ) along with gate dielectric layer Aluminum oxide (Al 2 O 3 ) was used for proposed structure implementation. Additionally, we investigated how trap charges affect noise figure (NF) and noise conductance (NC). Also, a CMOS inverter has been developed and its output characteristics have been compared for both the device architectures. ATLAS 3-D device simulator has been employed to conduct the simulations.
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