Geometric calibration of a computed laminography system for high‐magnification nondestructive test imaging

Nondestructive testing, which can monitor a product’s interior without disassembly, is becoming increasingly essential for industrial inspection. Computed laminography (CL) is widely used in this application, as it can reconstruct a product, such as a printed circuit board, into a three-dimensional (3D) highmagnification image using X-rays. However, such high-magnification scanning environments can be affected by minute vibrations of the CL device, which can generate motion artifacts in the 3D reconstructed image. Since such vibrations are irregular, geometric corrections must be performed at every scan. In this paper, we propose a geometry calibration method that can correct the geometric information of CL scans based on the image without using geometry calibration phantoms. The proposed method compares the projection and digitally reconstructed radiography images to measure the geometric error. To validate the proposed method, we used both numerical phantom images at various magnifications and images obtained from real industrial CL equipment. The experiment results confirmed that sharpness and contrast-to-noise ratio (CNR) were improved.