制作
材料科学
电极
电镀
光刻
光电子学
薄板电阻
透射率
纳米技术
复合材料
医学
病理
物理化学
化学
替代医学
图层(电子)
作者
Arshad Khan,Sangeon Lee,Taehee Jang,Ze Xiong,Cuiping Zhang,Jinyao Tang,L. Jay Guo,Wen‐Di Li
摘要
Here, the authors report the embedded metal-mesh transparent electrode (EMTE), a new transparent electrode (TE) with a metal mesh completely embedded in a polymer film. This paper also presents a low-cost, vacuum-free fabrication method for this novel TE; the approach combines lithography, electroplating, and imprint transfer (LEIT) processing. The embedded nature of the EMTEs offers many advantages, such as high surface smoothness, which is essential for organic electronic device production; superior mechanical stability during bending; favorable resistance to chemicals and moisture; and strong adhesion with plastic film. LEIT fabrication features an electroplating process for vacuum-free metal deposition and is favorable for industrial mass production. Furthermore, LEIT allows for the fabrication of metal mesh with a high aspect ratio (i.e., thickness to linewidth), significantly enhancing its electrical conductance without adversely losing optical transmittance. We demonstrate several prototypes of flexible EMTEs, with sheet resistances lower than 1 Ω/sq and transmittances greater than 90%, resulting in very high figures of merit (FoM) – up to 1.5 x 104 – which are amongst the best values in the published literature.
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