期刊:ASM International eBooks [ASM International] 日期:1998-12-01卷期号:: 1167-1170
标识
DOI:10.31399/asm.hb.mhde2.a0003219
摘要
Abstract Physical vapor deposition (PVD) coatings are harder than any metal and are used in applications that cannot tolerate even microscopic wear losses. This article describes the three most common PVD processes: thermal evaporation, sputtering, and ion plating. It also discusses ion implantation in the context of research and development applications.