Free-to-bound emission from interstitial carbon and oxygen defects (CiOi) in electron-irradiated Si

Abstract We determined the entire spectral shape of a broad band around 0.8 eV, previously termed the C08-band, which was observed commonly in Si by room-temperature photoluminescence after electron irradiation. The band has a peak at 0.77 ± 0.01 eV with long tails on both sides. We identified that the C08-band has the same origin as the C-line and occurs as a result of the recombination between a free electron and a hole bound by the deep trap due to the interstitial C and O defects (C i O i ). The long tails were explained by the superposition of phonon sidebands.