材料科学
氧化钒
热致变色
拉曼光谱
薄膜
溅射
单斜晶系
钒
分析化学(期刊)
电阻率和电导率
四方晶系
退火(玻璃)
Crystal(编程语言)
晶体结构
纳米技术
光学
化学
结晶学
冶金
有机化学
物理
电气工程
工程类
程序设计语言
计算机科学
作者
Chuan Li,J.H. Hsieh,Chuan Ming Su,Nai-Yun Chang
出处
期刊:Journal of vacuum science & technology
[American Institute of Physics]
日期:2021-11-29
卷期号:40 (1)
被引量:4
摘要
Vanadium oxide is known to be semiconductive and thermochromic with a very selective amount of oxygen in order to form the required monoclinic crystal structure (nonconductive, M phase) at room temperature and transform to a tetragonal phase (conductive, R phase) above 68 °C. In this study, vanadium oxide thin films are deposited by sputtering under different oxygen flow rates to include various amounts of oxygen, which is then followed by rapid thermal annealing to become crystalline with a variety of properties and functions. The properties and functions of annealed vanadium oxide are examined by x-ray diffraction for crystal structures, Raman spectrometer for crystal vibrational modes, four-point probe for electrical resistivity, and UV-Vis-NIR spectrometers for optical properties. All these characterizations help us to determine the range of oxygen supply under which thermochromic VO2 films can form. Results indicate that in our current setup, the lower oxygen (<0.25 SCCM) produces vanadium-rich films, the medium (0.5–1.5 SCCM) results in semiconductive films, and the higher (>2 SCCM) creates insulated oxides. Among the semiconductive films, the one deposited under 1.0 SCCM O2 supply after annealed becomes thermochromic as confirmed by the hysteresis changes of optical transmittance and electrical conductivity under thermal cycles between 25 and 95 °C.
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