A Linear Equivalent Circuit Model for Depletion-Type Silicon Microring Modulators

We present a linear equivalent circuit model for the depletion-type Si microring modulator (MRM). Our model consists of three blocks: one for parasitic components due to interconnects and pads, one for the electrical elements of the core p-n junction, and the third for a lossy LC tank representing Si MRM optical modulation characteristics. Model parameter values are extracted from measurement of a fabricated Si MRM device. Simulated modulation characteristics with our equivalent circuit show very good agreement with measured results. Using our model, we can analyze Si MRM modulation frequency response characteristics and perform gain-bandwidth product optimization of the entire Si photonic transmitter composed of a Si MRM and electrical driver circuits.