Facile and scalable fabrication of Ni cantilever nanoprobes using silicon template and micro-electroforming techniques for nano-tip focused electrohydrodynamic jet printing

Abstract Electrohydrodynamic jet (E-Jet) printing is a powerful technique for micro/nanostructure fabrication with high resolution and efficiency. However, conventional E-Jet printing are still limited in printing accuracy and ink adaptability due to the nozzle clogging effect. In this paper, we develop a nano-tip focused electrohydrodynamic jet (NFEJ) method to print high-resolution structures. The Ni cantilever nanoprobes with nanoscale radius of curvature (ROC) on their tips were manufactured by a facile and scalable method using silicon template and micro-electroforming technique. Scanning electron microscope was used to analyse the micromorphology of the silicon template with inverted pyramid pits, which was obtained from anisotropic wet etching of silicon. Electroforming mold was obtained by photolithography and plasma etching which divide the top side of Ni film into isolated cantilever pits. Ni cantilever nanoprobes with an average tip ROC of about 48 nm were achieved by the subsequent micro electroforming process. High-resolution droplets array with an average diameter of about 890 ± 93 nm were printed by the NFEJ printing head equipped with these Ni nanoprobes, which verified the practicality of the developed Ni nanoprobes for NFEJ printing.