Epitaxial growth of β-Ga2O3 thin films on SrTiO3 (1 1 1) and (1 0 0) substrates by chemical vapor deposition

Due to good lattice matching and bipolar doping behavior, wide bandgap SrTiO3 (STO) is a promising substrate for the heteroepitaxial growth of β-Ga2O3 to construct heterojunctions for (opto-)electronic device applications. However, the investigation of the growth of β-Ga2O3 film on the STO (1 1 1) substrate is still lacking. In this work, for the first time, the β-Ga2O3 (2¯ 01) thin films were epitaxially grown on the supercell matched STO (1 1 1) substrates by low pressure chemical vapor deposition. The effects of the source and growth temperatures on the surface roughness and crystalline quality of the β-Ga2O3 films were systemically investigated. By controlling the supply of Ga source, the heteroepitaxial β-Ga2O3 film grown under the optimized conditions exhibits a narrow X-ray diffraction rocking curve of 0.75° and a low root-mean-square roughness of 1.10 nm. Furthermore, the epitaxial growth of β-Ga2O3 films on the STO (1 0 0) substrate was also investigated. The heteroepitaxy of β-Ga2O3 films on STO lays the foundation for future device applications of β-Ga2O3-based heterojunctions.