Performance on lapping quartz glass by UV curing fixed abrasive pad with Gr2O3-diamond composite abrasives

To enhance the material removal rate and surface quality of the quartz glass lapping process, a novel fixed composite abrasives (CA) processing method for quartz glass has been proposed. The method involves using CA grains (initial grain size 10 μm, secondary grain size 14 μm) and single crystal diamond (SCD) of the same grain size as abrasive materials, and preparing fixed abrasive pad (FAP) through UV curing technology. Lapping and friction wear experiments were conducted on quartz glass, with material removal rate (MRR), surface roughness Ra, and friction coefficient (FC) being used as evaluation criteria to compare the lapping performance of the three types of fixed abrasive pads. The results demonstrated that the fixed composite abrasive pad (FCAP) exhibited the highest MRR of 4.13 μm/min, the highest surface roughness Ra of quartz glass after lapping at 115.829 nm, and the highest FC of 0.0802. Following closely, the W14 single crystal diamond fixed abrasive pad (SCDFAP) showcased the second-highest MRR of 1.85 μm/min, the second-highest surface roughness Ra after lapping at 92.51 nm, and the second-highest FC of 0.0492. On the other hand, the W3.5SCDFAP reported the lowest MRR of 0.346 μm/min, the lowest surface roughness Ra after lapping at 36.439 nm, and the lowest FC of 0.0396. This comparison indicates that under the same particle size conditions (initial and secondary particle size), FCAP prepared with CA grains exhibits superior friction and wear performance. It can effectively enhance the MRR, enabling efficient processing of quartz glass.