等离子体
离子
梁(结构)
离子源
原子物理学
物理
标识
DOI:10.1364/oft.2012.ow4d.1
摘要
The Tutorial will highlight recent advances achieved in R&D of Ion beam figuring (IBF), ion Beam Smoothing (IBS), Reactive Ion Beam Etching (RIBE) and atmospheric Plasma Jet Machining (PJM) (deep aspherization, nanometer shape correction, smoothing, film deposition) at IOM Leipzig.
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