沉积(地质)
溅射沉积
材料科学
物理气相沉积
溅射
腔磁控管
光电子学
过程(计算)
再现性
光学涂层
计算机科学
薄膜
纳米技术
地质学
化学
色谱法
操作系统
古生物学
沉积物
作者
Andreas Pflug,Stefan Bruns,Tobias Zickenrott,Chris Britze,Michael Vergöhl
标识
DOI:10.1364/oic.2022.tc.8
摘要
Due to its high film quality, reproducibility and deposition rate, magnetron sputtering is an established technology for production of optical filters. Optical devices benefit from the possibility to deposit coatings directly onto diffractive elements such as lenses. This reduces the number of components and internal reflections but requires a tailored thickness distribution, which is challenging to achieve e.g. via uniformity masks. We demonstrate that a digital twin derived from physical process modelling can successfully predict the deposition profile on 3D substrates and thereby minimize the number of pre-deposition experiments.
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