图像拼接
纳米尺度
吞吐量
微尺度化学
表征(材料科学)
材料科学
纳米技术
原子力显微镜
毫米
平面的
扫描探针显微镜
样品(材料)
计算机科学
光学
物理
人工智能
电信
数学教育
数学
计算机图形学(图像)
无线
热力学
作者
Yijie Liu,Xuexuan Li,Yuliang Zhang,Lin Guo,Yingchun Guan,Zhen Zhang
出处
期刊:Small
[Wiley]
日期:2023-08-23
卷期号:20 (1)
标识
DOI:10.1002/smll.202303838
摘要
Abstract The atomic force microscopy (AFM) is an important tool capable of characterization, measurement, and manipulation at the nanoscale with a vertical resolution of less than 0.1 nm. However, the conventional AFMs' scanning range is around 100 µm, which limits their capability for processing cross‐scale samples. In this study, it proposes a novel approach to overcome this limitation with an ultra‐large scale stitchless AFM (ULSS‐AFM) that allows for the high‐throughput characterization of an area of up to 1 × 1 mm 2 through a synergistic integration with a compliant nano‐manipulator (CNM). Specifically, the compact CNM provides planar motion with nanoscale precision and millimeter range for the sample, while the probe of the ULSS‐AFM interacts with the sample. Experimental results show that the proposed ULSS‐AFM performs effectively in different scanning ranges under various scanning modes, resolutions, and frequencies. Compared with the conventional AFMs, the approach enables high‐throughput characterization of ultra‐large scale samples without stitching or bow errors, expanding the scanning area of conventional AFMs by two orders of magnitude. This advancement opens up important avenues for cross‐scale scientific research and industrial applications in nano‐ and microscale.
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