Friction performance and corrosion resistance of MoS2/DLC composite films deposited by magnetron sputtering

MoS2/DLC composite films were prepared by a dual-target co-sputtering technique on silicon substrate. The composite films show a smooth surface with significantly reduced cracks and columnar structures. The crystal particles of the composite films became finer after using the composite, and the graphite-like structure carbon was incorporated into MoS2, which affected the crystallization and growth of MoS2. The hydrophobic and mechanical properties of the composite films and the thermal corrosion behavior of the composite films were also investigated. The results show that the friction coefficients of MoS2, DLC and MoS2/DLC films are 0.2159, 0.0671 and 0.0566, respectively. It is obviously that the composite films exhibit good friction properties. After 120 h of corrosion at room temperature, the composite films lost 1.9 × 10−3 mg/cm2, which is lower than the other two films of 2.1 × 10−3 mg/cm2 and 5.7 × 10−3 mg/cm2, thereby showing an excellent corrosion resistance.