Synthesis and Functional Properties of Vanadium Oxides: V2O3, VO2, and V2O5 Deposited on Glass by Aerosol‐Assisted CVD

Abstract Thin films of vanadium oxides were deposited on glass by aerosol‐assisted (AA) CVD from vanadium(III) acetylacetonate and vanadyl(IV) acetylacetonate. The vanadium precursor, solvent, and carrier gas flow rate determined the phase of vanadium oxide formed (V 2 O 3 , VO 2 , or V 2 O 5 ). Films were characterized using various analytical techniques. VO 2 films were analyzed at various temperatures to study their thermochromic behavior. The V 2 O 3 reflectance‐transmission plots showed a cross‐over (ideal behavior for a solar‐control mirror).