材料科学
光电探测器
光电子学
暗电流
半导体
带隙
退火(玻璃)
镓
氧化镓
太阳能电池
纳米技术
复合材料
冶金
作者
Zhaoying Xi,S Yan,Zeng Liu,Lili Yang,Maolin Zhang,Yufeng Guo,Weihua Tang
出处
期刊:Nanotechnology
[IOP Publishing]
日期:2023-12-15
卷期号:35 (9): 095204-095204
标识
DOI:10.1088/1361-6528/ad10e3
摘要
Abstract As an ultra-wide bandgap semiconductor, gallium oxide (Ga 2 O 3 ) has been extensively applied in solar-blind photodetectors (PDs) owing to the absorbance cut-off wavelength of shorter than 280 nm, and the optimized technologies of detection performance is seriously essential for its further usages. Herein, a feasible thermal reorder engineering method was performed through annealing Ga 2 O 3 films in vacuum, O 2 and oxygen plasma atmospheres, realizing to tune solar-blind photosensing performance of Ga 2 O 3 PDs. Thermal treatment, in fact a crystal reorder process, significantly suppressed the noise in Ga 2 O 3 -based PDs and enhanced the photo-sensitivity, with the dark current decreasing from 154.63 pA to 269 fA and photo-to-dark current ratio magically raising from 288 to 2.85 × 10 4 . This achievement is dependent of energy-band modulation in Ga 2 O 3 semiconductor, that is certified by first-principles calculation. Additionally, annealing in oxygen atmospheres notably reduces the concentration of oxygen vacancies in the surface of films, thereby improving the performance of the PDs; the oxygen vacancy is extremely concerned in oxide semiconductors in the view of physics of surface defects. In all, this work could display a promising guidance for modulating the performance of PDs based on wide bandgap oxide semiconductor, especially for hot Ga 2 O 3 issue.
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