A Closed-Loop Solvent Recycling Device for Polymer Removal in Graphene Transfer Process

The traditional chemical vapor deposition (CVD)graphene transfer process generates a large amount of solvent waste, posing a significant sustainability challenge. To address this, we designed a Cyclic Cleaning Multi-Chamber (CCMC) system. Inspired by Soxhlet extraction, the CCMC enables closed-loop solvent recycling through integrated distillation, condensation, and reflux mechanisms. Experimental results show that the system effectively removes poly(methyl methacrylate) (PMMA) residues from transferred graphene without damaging its structural integrity, a finding confirmed by Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). The CCMC system achieves a solvent recovery efficiency of over 98% across 25 cycles using acetone, significantly reducing solvent consumption compared to conventional methods. While providing this substantial environmental benefit, the energy demand remains moderate, increasing by only about 15 kWh. These results position the CCMC as a scalable, eco-friendly solution for the semiconductor and nanomaterial industries, promoting the broader adoption of sustainable manufacturing practices.