Process Development of Films Deposited on Inner Wall of Long Tube by Arc Ion Plating

Based on plasma physics, basic characteristics of magnetofluid and discharge mechanism of the arc spot, this paper proposes a deposition technology on the inner wall of long tube by magnetic and electric field enhanced arc ion plating. The conical target material structure immersed in the axial magnetic field is adopted as the arc source of arc ion plating. Studies have shown that this technology can achieve the effective coating on the inner wall of long tube, which means to deposit the fatal (Ti, Al) N films at the depth of 120mm in the inner wall of the 20mm stainless steel component. The thickness of (Ti, Al) N film is 0.3-1.5m and its micro-hardness reaches 20GPa, which can significantly improve the wear resistance and corrosion resistance of the inner wall of the components, thereby increasing the service life of stainless steel components.