<title>Developments In Fabrication Of Binary Optical Elements</title>

We have produced highly efficient binary diffraction gratings -- 94% first order diffraction efficiency measured in the infrared (10.6 μm) on straight binary gratings and on binary holographic off-axis lenses. The observed point-spread functions of these lenses (F/10, f = 25 cm) were limited only by diffraction. To fabricate gratings we adapted IC production techniques. Our work brings together three independent developments: (1) theories on binary diffraction gratings operating in the EM domain, (2) large-scale integration (LSI) advances in pattern generation and substrate depositions, and (3) improvements in reactive ion-beam etching techniques.