光学
材料科学
磁流变液
曲面(拓扑)
计算机科学
适应(眼睛)
泽尼克多项式
声学
激光束
工程制图
机械工程
图像处理
信号处理
空间频率
物理
误差分析
变形(气象学)
作者
Ci Song,Hailun Si,Ziyuan Cui,Jianglin Long,Feng Shi,Wanli Zhang,Bo Wang
出处
期刊:Optics Express
[Optica Publishing Group]
日期:2026-08-26
卷期号:34 (18): 34737-34737
摘要
Complex optical surfaces are integral to advanced optical systems, and magnetorheological finishing (MRF) serves as their primary fabrication method. A single constant tool influence function (TIF), however, cannot readily reconcile processing precision with processing efficiency. The resulting throughput limitation cannot meet the great demand for complex optical surfaces, thereby constraining the development of optical systems. To address this trade-off, this paper proposes a polishing method in which the TIF adapts to the figure error. First, a dwell time model incorporating the adaptation of the TIF to the figure error was established. Particle swarm optimization was then employed to select the adaptive processing scheme. The stability and effectiveness of the model were then verified through simulation, followed by experimental validation of its correctness and effectiveness. Compared with a high-precision single-TIF process (TIF #3, d = 0.20 mm), the adaptive method yielded a 32.4% larger residual RMS error but reduced the processing time by 72.7%. Compared with a fast single-TIF process (TIF #12, d = 0.40 mm), the adaptive method reduced the residual RMS by 33 nm (32.9% relative reduction) and cut the processing time by 9.4 min. These results demonstrate that TIF adaptation to figure error in MRF effectively balances processing efficiency and precision for complex surface optics. The method provides theoretical and technical support for efficient MRF based fabrication of complex curved optical elements and carries substantial practical value.
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