石墨烯
纳米技术
纳米光刻
材料科学
平版印刷术
电子束光刻
纳米压印光刻
下一代光刻
模版印刷
制作
石墨烯纳米带
纳米尺度
光电子学
抵抗
病理
医学
替代医学
图层(电子)
作者
Yiqun Zheng,Hua Wang,Shifeng Hou,Deying Xia
标识
DOI:10.1002/admt.201600237
摘要
With the maturation and development of graphene synthesis and deposition, the next challenge is to produce graphene patterns to advance the practical applications of graphene in areas related to energy, the environment, sensors, and health care. In recent years, lithographically defined graphene patterns have arisen and received considerable attention. The patterns generated by lithographical methods exhibit greater positional accuracy, nanoscale features, and better uniformity, in addition to producing ready‐to‐use final devices. Here, recent lithographical nanofabrication methods for the preparation of graphene nanopatterns, such as graphene nanoribbons and graphene nanomeshes, and their applications are reviewed. Fabrication techniques for graphene patterning are discussed, including electron‐beam lithography, nanoimprint lithography, nanosphere lithography, interferometric lithography, and ion beam lithography. Finally, future perspectives in the field are discussed.
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