基于原子力显微镜的石墨烯可控裁剪方法研究

The electrical properties of graphene strongly rely on its size,geometry and edge structure.Therefore,the ability of fabricating graphene into desired configuration is one of the enabled techniques to manufacture graphene-based nanodevices and push it into practical applications.However,there is no effective way to achieve this goal till today.In this paper,an Atomic Force Microscopy(AFM) based mechanical cutting method is developed to meet the urgent need of graphene fabrication.Theoretical analysis between cutting force and lattice cutting angle is carried out,which reveals that the value of the cutting force is related with the graphene cutting direction.Different graphene shapes are fabricated to demonstrate the efficiency and effectiveness of the proposed method.Furthermore,after many times of cutting experiments with the rotation sample method,we proved that the cutting forces do vary with the lattice cutting direction.The experimental results keep consistent with the theoretical analysis.This discovery makes it possible to build a close-loop fabrication method with real-time force as sensor feedback.It also lays the foundation of theory and experiments on controllable graphene cutting with lattice precision.Combining parallel multi-tip technology,the proposed method makes it possible to fabricate large-scale graphene-based device at low cost and high efficiency.