Design and Simulation of Reverse-flow Showerhead MOCVD Reactors

The shortcomings of current MOCVD reactors are discussed and a novel reverse-flow showerhead MOCVD reactor is proposed in this paper.In the reactor the reactants were sprayed from showerheads above the substrate,and the exhausts were expelled to the outlet also located above the substrate.Thus the reactant concentration uniformity along the radial direction was improved.A three-dimensional simulation of flow phenomena in the reactor was conducted.By varying the distance between adjacent spraying tubes,the distance between the tubes and substrate,flow rates of reactants and pressure,the optimized temperature and concentration fields above the substrate were obtained.