ITO Top‐Electrodes via Industrial‐Scale PLD for Efficient Buffer‐Layer‐Free Semitransparent Perovskite Solar Cells

Abstract The deposition of transparent conductive oxides (TCO) usually employs harsh conditions that are frequently harmful to soft/organic underlayers. Herein, successful use of an industrial pulsed laser deposition (PLD) tool to directly deposit indium tin oxide (ITO) films on semitransparent vacuum‐deposited perovskite solar cells without damage to the device stack is demonstrated. The morphological, electronic, and optical properties of the PLD deposited ITO films are optimized. A direct relation between the PLD chamber pressure and the solar cell performance is obtained. The semitransparent perovskite solar cells prepared exclusively by vacuum‐assisted techniques had fill factors of 78% and exceeded 18% in power conversion efficiencies. This demonstrates that the direct deposition of TCO‐based top electrodes without protective buffer layers is possible and leads to efficient devices.