A visible-light and X-ray dual-mode microscopic imaging system based on an inverted optical microscope

Abstract A dual-mode microscopic imaging system integrating visible-light and X-ray microscopy was developed based on an inverted optical microscope to address the limitation of conventional microscopy techniques, which are restricted to surface observation. The system incorporates an optical coupling design where a high-performance GAGG:Ce scintillator crystal is coupled to the microscope objective, enabling the conversion of X-rays into visible light for internal structure imaging while retaining the native visible-light surface imaging capability. This design allows for non-destructive, correlative observation of surface morphology and internal microstructure without sample movement. The system exhibits a linear response between image grayscale values and X-ray tube current/voltage, confirming stable and controllable imaging performance. The modulation transfer function (MTF) reached 0.6 at 10 lp/mm and 0.2 at 30 lp/mm, demonstrating high contrast and spatial resolution. Imaging results from packaged chips and metal samples reveal high-resolution details of both surface and internal structures. The system significantly enhances the comprehensiveness and accuracy of sample analysis, offering a versatile solution for applications in materials science, microelectronics inspection, and non-destructive testing.