Integrated Mixed Potential Gas Sensor with Efficient Structure for Discriminative Volatile Organic Compounds Detection

Abstract Amid growing interest in the precise detection of volatile organic compounds (VOCs) in industrial field, the demand for highly effective gas sensors is at an all‐time high. However, traditional sensors with their classic single‐output signal, bulky and complex integrated structure when forming array often involve complicated technology and high cost, limiting their widespread adoption. Here, this study introduces a novel approach, employing an integrated YSZ‐based (YSZ: yttria‐stabilized zirconia) mixed potential sensor equipped with a triple‐sensing electrode array, to efficiently detect and differentiate six types of VOCs gases. This innovative sensor integrates NiSb 2 O 6 , CuSb 2 O 6 , and MgSb 2 O 6 sensing electrodes (SEs), which are sensitive to pentane, isoprene, n‐propanol, acetone, acetic acid, and formaldehyde gases. Through feature engineering based on intuitive spike‐based response values, it accentuates the distinct characteristics of every gas. Eventually, an average classification accuracy of 98.8% and an overall R‐squared error (R 2 ) of 99.3% for concentration regression toward six target gases can be achieved, showcasing the potential to quantitatively distinguish between industrial hazardous VOCs gases.