Data processing for measuring the geometric parameters of aspheric mirrors by contour measuring machine

To study the geometric parameters of aspheric mirrors using a contour measuring machine, a mathematical model based on the least squares method was proposed. This model can simultaneously measure the eccentricities in the X and Y directions of the optical axis, the tilts in the X and Y directions, and the radius of curvature errors that occur during the manufacturing process of aspheric mirrors. Data simulations were conducted using Matlab programming. Precision analysis indicates that with an error magnitude of 2μm, the measurement accuracy for eccentricities in the X and Y directions can reach 0.036mm, for tilts in the X and Y directions up to 12.96 arcseconds, and for radius of curvature errors up to 0.0016mm. The results demonstrate that this data processing model is feasible for calculating the geometric parameters of aspheric mirrors.