Flexible conductivity-temperature-depth-strain (CTDS) sensor based on a CNT/PDMS bottom electrode for underwater sensing

Abstract Marine hydrological information has a significant impact on human development and the utilization of the oceans, which can be monitored with underwater sensors. In the past, ocean research has relied on the use of bulky underwater recorders and sensory telemetry networks. In this study, an integrated flexible sensor is developed for underwater conductivity, temperature, depth, and strain detection. Platinum resistance sensors were used for temperature and strain measurements, conductivity sensors with interdigitated electrodes were used for salinity measurements, and capacitive pressure sensors for depth measurements. Two kinds of flexible capacitive pressure sensors were fabricated with a carbon nanotube/polydimethylsiloxane (CNT/PDMS) bottom electrode and copper/polyimide (Cu/PI) bottom electrode. The sensor with the CNT/PDMS bottom electrode outperformed the sensor with the Cu/PI bottom electrode over a wide pressure range (<5 MPa) and showed stable capacitance up to 1000 cycles. COMSOL simulations also support our experimental results with high sensitivity of the sensor with a CNT/PDMS bottom electrode. The integrated flexible sensor is durable and lightweight, making it ideal for use as a stationary monitoring sensor or for attachment to a variety of marine animals.