Development of Transparent Conductive Material of Mg(OH)2-C by Magnetron Sputtering

It is well known that transparent conductive materials are key materials for FPD (Flat Panel Display). A practical transparent conductive material is indium tin oxide (ITO) consisting of indium oxide and tin oxide. However, indium price has increased over the last several years because indium is a rare metal with 0.00001 of Clarke number. Therefore searching alternative transparent conductive materials rather than indium has been very active over the last decades. In this study, rf-magnetron sputtering method is used. Magnesium and graphite target are co-sputtered and Mg-C films were formed. Then, Mg-C film became transparent after being left in moistured air for 10−15 min. Transmittance of 90% in average in the range of wavelength of 380−1000nm. Resistivity of 10−1 Ωcm was observed. In this work it will be demonstrated that black Mg-C non-equilibrium films that became consequently were transparent with electric resistively after exposing in the air.