High-Spatial-Resolution Thermoreflectance Microscope Using Shear Force Microscopy

Abstract A high-spatial-resolution thermoreflectance microscope based on shear force microscopy is demonstrated for thermal analysis of micro- and nano-electronic devices with spatial resolution beyond diffraction limit. To overcome the diffraction limit, a fiber-optic shear force microscope with an aperture smaller than the wavelength of the light source is established, and the optical fiber attached to the tuning fork is approached to the sample device (sub-micron-wide gold heater). The thermoreflectance microscope collects light reflected from the sample device through the aperture of the optical fiber. By analyzing the reflection signal that varies with respect to temperature and two-dimensional mapping of analysis results, high-spatial-resolution temperature distribution image is obtained. The developed high-spatial-resolution thermoreflectance microscope is expected to contribute to analyze device fault as well as localized thermal issues in micro- and nano-electronic devices.