Submicron titania pattern fabrication via thermal nanoimprint printing and Microstructural analysis of printable titania gels

Titania is a functional oxide used as a catalyst and photocatalyst, which has various applications. Modifying the surface morphology and creating micro patterns on titania can significantly enhance its catalytic efficiency and utility in semiconductor devices. This study focuses on the fabrication of submicron patterns on titania using thermal nanoimprinting. The process involves the preparation of a high-viscosity sol consisting of 2-butoxyethanol, titanium butoxide, ethylene glycol, and water, followed by drying on a substrate to obtain a printable titania gel. We investigated the structural characteristics of this printable titania gel using Fourier transform infrared thermal analysis and high-energy X-ray diffraction. These structural analyses shed light on the critical factors affecting the growth of the Ti–O network within the gel and the effect of the organic content of the gel on its properties.