单层
石墨烯
箔法
化学气相沉积
材料科学
蚀刻(微加工)
甲烷
沉积(地质)
石墨烯纳米带
图层(电子)
纳米技术
化学工程
化学
复合材料
有机化学
生物
工程类
古生物学
沉积物
作者
Yijian Liang,Wenjing Zhang
标识
DOI:10.1088/2053-1591/ac9bd1
摘要
Abstract Chemical vapor deposition is the most promising approach for synthesis of large-area monolayer graphene on Cu foil. However, numerous factors can result in formation of adlayers, such as the morphology of the Cu foil, methane concentration, and growth temperature. Here, we report atmospheric pressure chemical vapor deposition growth of large-area adlayer-free monolayer graphene by the two-step ‘bottom-up-etching’ method. The experimental results showed that a temperature increase in the second step can dramatically accelerate etching of the bottom graphene layer. A growth model for adlayer-free monolayer graphene on Cu foil is proposed.
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