A New Eco-Friendly Photo Resist Stripping Technology Using "Ethylene Carbonate"

Recently, it is demanded to form a high performance pattern on an enlarged circuit board in a low cost in the process to produce LCD devices. In the part of upgrading the performance, the materials are reexamined such as Al or Mo to Cu. Furthermore, in the process of reexamining the materials, it is demanded that such materials are low in environmental load. Therefore, we examined if it is possible to reuse Ethylene Carbonate, a photo resist stripper, with low environmental load by decomposing dissolved photo resist using ozone gas. Furthermore, we examined if it is possible to apply Ethylene Carbonate without damaging the next generation wiring materials. As a result, we were able to identify the most efficient condition for ozone gas to recycle Ethylene Carbonate used as a photo resist stripper. Ethylene Carbonate was not only suitable for Al · Mo wiring, but was also suitable for the next generation Cu wiring. Therefore by using Ethylene Carbonate for the new and old process for stripping photo resists, it is able to reduce the environmental load and also reduce the cost for stripping.