材料科学
热稳定性
纳米尺度
薄膜
相变
相变存储器
光电子学
计算机数据存储
相(物质)
非易失性存储器
热的
纳米技术
作者
Zhehao Xu,Xiao Su,Sicong Hua,Jiwei Zhai,Sannian Song,Zhitang Song
标识
DOI:10.1088/1361-6528/ac3613
摘要
Abstract For high-performance data centers, huge data transfer, reliable data storage and emerging in-memory computing require memory technology with the combination of accelerated access, large capacity and persistence. As for phase-change memory, the Sb-rich compounds Sb 7 Te 3 and GeSb 6 Te have demonstrated fast switching speed and considerable difference of phase transition temperature. A multilayer structure is built up with the two compounds to reach three non-volatile resistance states. Sequential phase transition in a relationship with the temperature is confirmed to contribute to different resistance states with sufficient thermal stability. With the verification of nanoscale confinement for the integration of Sb 7 Te 3 /GeSb 6 Te multilayer thin film, T-shape PCM cells are fabricated and two SET operations are executed with 40 ns-width pulses, exhibiting good potential for the multi-level PCM candidate.
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