铌酸锂
光学
材料科学
谐振器
薄膜
光电子学
物理
纳米技术
作者
Xingxu Liu,Ziliang Ruan,Shangsen Sun,Changjian Guo,Kaixuan Chen,Ning Zhu,Liu Liu
出处
期刊:Optics Express
[Optica Publishing Group]
日期:2024-02-15
卷期号:32 (6): 9433-9433
被引量:4
摘要
Sharp bends are crucial for large-scale and high-density photonics integration on thin-film lithium niobate platform. In this study, we demonstrate low-loss (<0.05 dB) and sharp bends ( R eff = 30 µm) using free-form curves with a 200-nm-thick slab and a rib height of 200 nm on x-cut lithium niobate. Employing the same design method, we successfully realize a compact fully-etched ring resonator with a remarkably large free spectral range of 10.36 nm experimentally. Notably, the equivalent radius of the ring resonator is a mere 15 µm, with a loaded Q factor reaching 2.2 × 10 4 .
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