原子层沉积
异质结
沉积（地质）
纳米技术
图层（电子）
材料科学
光电子学
地质学
沉积物
古生物学
作者
Hongyin Pan,Lihao Zhou,Zheng Wei,Xianghong Liu,Jun Zhang,Nicola Pinna
标识
DOI：10.1088/2631-7990/acc76d
摘要
Highlights Atomic layer deposition is versatile in precise design of heterostructure materials. Gas sensing performances of heterostructures engineered by ALD are reviewed. Future developments and challenges faced by ALD-designed materials are discussed.
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