Theory and Modeling of Continuous Electrowetting Microactuation

Abstract This paper investigates theoretical aspects of microactuation by continuous electrowetting (CEW), actuation based on electrical control of surface tension. Known as a powerful actuation mechanism in microscale for some time, compatibility of CEW with lithographic fabrication technologies of MEMS has been demonstrated recently. This paper describes theoretical interpretation and modeling of the motion by CEW, explaining the experimental observation. We considered several electrochemical and fluid mechanical effects important for further microfluidic applications. These include details of fluid motion, modeling for different modes of motion, and the effect of fluid resistance in the micro channel.