A Study of Control for Compensating Specimen Surface Orientation in Three-Dimensional Surface Roughness Measuring Instrument.

When we measure three-dimensional surface roughness, higher skill is demanded to locate the specimen surface within a range of profilometer. From this need, the authors developed the three-dimensional profilometer to measure micro irregularities of surface by applying a commercial stylus profilometer. The developed system was controlled automatically the orientation of specimen table by the micro-computer. This computer calculates the inclinations of table in X- and Y-directions and the height to keep the diamond stylus in a measuring range. The height was corrected in an accuracy of 0.1μm and the inclination of table in about 0.02μm/mm.