AlN film based piezoelectric large-aperture MEMS scanning micromirror integrated with angle sensors

This paper reports on the successful implementation of an aluminum nitride (AlN) piezoelectric film for the fabrication of a large-aperture MEMS scanning micromirror. To overcome the shortcoming of the relatively low piezoelectric coefficients of AlN film, a leverage amplification mechanism and resonant amplification effect are employed to amplify the scan angle of the mirror plate. Compared to conventional PZT piezoelectric micromirrors, the fabricated AlN film-based micromirror has demonstrated excellent compatibility with the current MEMS process. In particular, piezoelectric angle sensors are monolithically integrated without any additional process or material. The test results indicate the great linear actuation relationship and the good signal quality of the integrated angle sensors. Therefore, the proposed AlN micromirror will provide a new promising option for vast optical microsystem applications.